Agilent 5990-4853EN Quantitative Mechanical Measurements at the Nano-Scale Using the DCMII - Application Not free download

File name 5990-4853EN Quantitative Mechanical Measurements at the Nano-Scale Using the DCMII - Application Not

Keysight Technologies Quantitative Mechanical Measurements at the Nano-Scale Using the DCM II Application Note Introduction respectively. The range and resolution in force are 30mN and 3nN, respectively. Feature miniaturization, especially in the Because the DCM II has a resonant fre- electronics industry, demands knowledge quency of about 120Hz, measurements of mechanical properties on the scale of force and displacement are insensitive of nanometers. Instrumented indenta- to environmental noise which occurs at tion facilitates such testing, because the lower frequencies. The DCM II can be area of the contact impression does not used in combination with a variety of have to be measured visually, but can indenter tips including Berkovich, be inferred solely from the relationship cube-corner, and sphero-conical. between applied force and consequen- Changing from one tip to another tial penetration of the indenter into the takes just a few minutes. Figure 1. The Keysight DCM II. testing surface 1. Instrumented indenta- tion has been used since the 1980's to make measurements at the sub-micron Experimental Method scale, but recent developments allow Prior to testing, the shape of the diamond quantitative determination of mechani- indenter was "calibrated" by performing cal properties using indents of just a few 55 indents on a reference material, fused nanometers deep. This article addresses silica. Then seven different materials, special considerations for such testing, including the fused silica, were tested and reports results for seven different using the force-time algorithm shown in materials tested with the DCM II. Figure 2. All materials were tested to the same peak force of 50N. The materials The DCM II, shown in Figure 1, is an tested were polycarbonate, Pyrex, fused optional high-resolution actuating silica, single-crystal aluminum, silicon Figure 2. Force-time algorithm for transducer for the Keysight Technologies, (111), nickel, and sapphire. Because indentation tests. Inc. G200 Nano Indenter. The DCM II these materials are of varying hardness, may be used in addition to or instead of the indentation depths resulting from the standard indentation head. If both the applied force of 50N varied. The heads are included on a single system, deepest indents of about 100nm were transition from one head to the other is achieved on the polycarbonate, while entirely software controlled; the user the shallowest indents of less than 7nm doesn't have to make any adjustments were achieved on the sapphire. Fifteen to hardware, controllers, or calibrations. indents were performed on each sample The range and resolution in displace-